JPS60132457U - 気相成長装置のクランプ機構 - Google Patents

気相成長装置のクランプ機構

Info

Publication number
JPS60132457U
JPS60132457U JP1839584U JP1839584U JPS60132457U JP S60132457 U JPS60132457 U JP S60132457U JP 1839584 U JP1839584 U JP 1839584U JP 1839584 U JP1839584 U JP 1839584U JP S60132457 U JPS60132457 U JP S60132457U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
clamping mechanism
connecting member
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1839584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH017725Y2 (en]
Inventor
後藤　泰山
岩田　公弟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP1839584U priority Critical patent/JPS60132457U/ja
Publication of JPS60132457U publication Critical patent/JPS60132457U/ja
Application granted granted Critical
Publication of JPH017725Y2 publication Critical patent/JPH017725Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1839584U 1984-02-09 1984-02-09 気相成長装置のクランプ機構 Granted JPS60132457U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1839584U JPS60132457U (ja) 1984-02-09 1984-02-09 気相成長装置のクランプ機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1839584U JPS60132457U (ja) 1984-02-09 1984-02-09 気相成長装置のクランプ機構

Publications (2)

Publication Number Publication Date
JPS60132457U true JPS60132457U (ja) 1985-09-04
JPH017725Y2 JPH017725Y2 (en]) 1989-03-01

Family

ID=30506993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1839584U Granted JPS60132457U (ja) 1984-02-09 1984-02-09 気相成長装置のクランプ機構

Country Status (1)

Country Link
JP (1) JPS60132457U (en])

Also Published As

Publication number Publication date
JPH017725Y2 (en]) 1989-03-01

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